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ControlZone™
Point of Use Gas Generator
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Single
Output Ozone Generators
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Multiple
Tank Ozone Generator
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Single
In-Situ Chemical Generator
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The
Award Winning Coldstrip™ System
Using the Chilled Ozone Process
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DryZone™
Patented Solvent Dryer
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Chemical
Generators
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Patented
Two Point Wafer Carrier
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Chemical
Blending System
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“Dynamic”
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“Static”
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Sparger
Plate
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Patented
Premixer Vessel
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Patented
Diffuser, All Teflon Construction,
Contains Over 300,000 Mixing Sites
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Legacy
Systems Incorporated
5411 Randall Place
Fremont, CA 94538
Phone: 510-651-2312
Fax: 510-651-9444
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