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Diffusers, Sparger
Plates, & Premixers
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Patented
PFA/PTFE Diffusers, Sparger Plates and Premixers for in-situ gas
delivery, without metal or particle contamination. For use with
all ozone, ammonium hydroxide, hydrochloric, and hydrofluoric acid
solutions. Suitable for operating temperatures from 1o
- 165oC. |
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Legacy
Systems Incorporated
5411 Randall Place
Fremont, CA 94538
Phone: 510-651-2312
Fax: 510-651-9444
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