Diffusers, Sparger Plates, & Premixers

Patented PFA/PTFE Diffusers, Sparger Plates and Premixers for in-situ gas delivery, without metal or particle contamination. For use with all ozone, ammonium hydroxide, hydrochloric, and hydrofluoric acid solutions. Suitable for operating temperatures from 1o - 165oC.
 

 


Legacy Systems Incorporated
5411 Randall Place
Fremont, CA 94538
Phone: 510-651-2312
Fax: 510-651-9444