Ozone gas output to single process tank or use point: Low flow ozone generator supplies oxidant to one process tank.

For use with sulfuric-ozone resist strip processes or surface conversion of hydrophobic to hydrophilic wafers or light organic cleaning.

Ozone gas output to multiple process tanks (1-4) or use points: High flow ozone generator supplies oxidant to one, two, or three process tanks.

For use with sulfuric-ozone photoresist strip processes or surface conversion of hydrophobic to hydrophilic wafers or light organic cleaning.

Legacy Systems Incorporated 5411 Randall Place Fremont, CA 94538 Phone: 510-651-2312 Fax: 510-651-9444