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End Effectors
Patented Inert Carbon
Fiber, PTFE, or Quartz two point wafer contact End Effectors.
Wafer intrusion
is less than 2mm on 200mm wafers.
| Carbon Fiber |
Quartz |
Fluoroloy®
- T Reinforced |
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Wafer
Carrier Patented Groove Cut
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Legacy
Systems Incorporated
5411 Randall Place
Fremont, CA 94538
Phone: 510-651-2312
Fax: 510-651-9444
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