End Effectors

Patented Inert Carbon Fiber, PTFE, or Quartz two point wafer contact End Effectors.

Wafer intrusion is less than 2mm on 200mm wafers.

Carbon Fiber Quartz Fluoroloy® - T Reinforced
Wafer Carrier Patented Groove Cut

 


Legacy Systems Incorporated
5411 Randall Place
Fremont, CA 94538
Phone: 510-651-2312
Fax: 510-651-9444