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DryZone™ The DryZone™ is a patented revolutionary new solvent gradient dryer. It exceeds the most vigorous Total Organic Carbon (TOC) or Volatile Organic Carbon (VOC) environmental concerns. Substrates are rinsed in deionized water to remove any water miscible inorganic impurities. After rinsing, the substrates enter the solvent chamber to develop an immiscible boundary layer, which removes organic impurities. The substrates are then processed through an ozone chamber, with or without ultraviolet light exposure, to convert all traces of organic materials to carbon dioxide gas.
The substrate surfaces are free from trace organics, moisture, and particles. The substrate surfaces are stable hydrophilic surfaces. In the case of silicon wafers, the surface is Si-O terminated. If hydrophobic surfaces are required, a 10 second post ozone conversion step renders silicon wafers Si-H terminated. The dryer has no detectable VOC's in the exhaust, and supports green chemistry initiatives, unlike isopropyl alcohol consuming dryers. Because the dryer uses reactive chemistries, it is more than just particle neutral, it is particle reducing!
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