Coldstrip™

Coldstrip™ patented subambient photresist stripping system.

Turnkey replacement for sulfuric-piranha solutions, ashers, solvent strippers.

Covered under multiple United States and Foreign Patents.

Ozone Concentrations from 75 to >100ppm.

Ozonolysis

 

 


Legacy Systems Incorporated
5411 Randall Place
Fremont, CA 94538
Phone: 510-651-2312
Fax: 510-651-9444