Multiple Chemical Point of Use Generator housed in one cabinet provides any combination of ammonium hydroxide, hydrochloric acid, or hydrofluoric acid aqueous solutions.

Used for manufacturing prediffusion clean chemistries at the wetstation, or creating large volume quantities for in-house bottle or drum-fill operations

Automatically generates and supplies a precise chemical concentration solution to either a wet process tank or spray tool. Used for cleaning or etching wafers. Manufactures ammonium hydroxide, hydrochloric, or hydrofluoric acid solutions.

Hydrofluoric, buffered oxide, or metal etchants can be blended from either aqueous chemicals and/or gas phase components. Precise chemistries are metered for complete accuracy and reproducibility. The result is an etchant ideally suited for consistent lot to lot wafer processing.

Legacy Systems Incorporated 5411 Randall Place Fremont, CA 94538 Phone: 510-651-2312 Fax: 510-651-9444